Kniha Specialty Gas Analysis - A Practical Guidebook Jeremiah D. Hogan

Specialty Gas Analysis - A Practical Guidebook

Jazyk: Angličtina
Väzba: Pevná
Vydavateľ: John Wiley & Sons Inc
Dostupnosť: Skladom u dodávateľa
Odosielame za 10-18 dní
239.94
The semiconductor industry is moving toward gas-phase reagents, increasing the relative importance o...

Informácie o knihe

Jazyk
Angličtina
Väzba
Kniha - Pevná
Vydalo
1997
Stránok
200
EAN
9780471185987
ISBN
0471185981
Enbook ID
04888313
Hmotnosť
468
Rozmery
159 x 241 x 19

Kompletný popis

The semiconductor industry is moving toward gas-phase reagents, increasing the relative importance of gas purity. Anyone who deals in the manufacturing of these devices needs to understand the technology available for modern gas analysis. Most specialty gas vendors have some re in place for quality assurance, but these usually are very simplistic and outdated methods. No book was available that gave guidance on providing accurate, reproducible data on specialty gas products. This is the first book that provides an introduction to current analytical methods and equipment for the analysis of high- purity gases used in the semiconductor industry and related fields.

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