Semiconductor Lithography

Name: Semiconductor Lithography
Brand: Springer-Verlag New York Inc.
SKU: 9781461282280
Price: 149.54 EUR
Availability: InStock

Principles, Practices, and Materials

Autor: Wayne M. Moreau

Jazyk:

Väzba: Brožovaná

Vydavateľ: Springer-Verlag New York Inc.

Dostupnosť: Skladom u dodávateľa

Odosielame za 5-8 dní

149.54 €

Semiconductor lithography is one of the key steps in the manufacturing of integrated silicon-based c...

Informácie o knihe

Autor

Wayne M. Moreau

Jazyk

Angličtina

Väzba

Kniha - Brožovaná

Vydalo

2012

Stránok

952

EAN

9781461282280

ISBN

1461282284

Enbook ID

02174532

Vydavateľ

Springer-Verlag New York Inc.

Hmotnosť

1606

Rozmery

170 x 244 x 51

Kompletný popis

Semiconductor lithography is one of the key steps in the manufacturing of integrated silicon-based circuits. In fabricating a semiconductor device such as a transistor, a series of hot processes consisting of vacuum film deposition, oxidations, and dopant implantation are all patterned into microscopic circuits by the wet processes of lithography. Lithography, as adopted by the semiconductor industry, is the process of drawing or printing the pattern of an integrated circuit in a resist material. The pattern is formed and overlayed to a previous circuit layer as many as 30 times in the manufacture of logic and memory devices. With the resist pattern acting as a mask, a permanent device structure is formed by subtractive (removal) etching or by additive deposition of metals or insulators. Each process step in lithography uses inorganic or organic materials to physically transform semiconductors of silicon, insulators of oxides, nitrides, and organic polymers, and metals, into useful electronic devices. All forms of electromagnetic radiation are used in the processing. Lithography is a mUltidisciplinary science of materials, processes, and equipment, interacting to produce three-dimensional structures. Many aspects of chemistry, electrical engineering, materials science, and physics are involved. The purpose of this book is to bring together the work of many scientists and engineers over the last 10 years and focus upon the basic resist materials, the lithographic processes, and the fundamental principles behind each lithographic process.

Mohlo by vás zaujímať

Zákazníci, ktorí si kúpili túto knihu, kúpili tiež

Najčastejšie vyhľadávané

Categories

Authors

Publishers

Produkty

Produkty

Najčastejšie vyhľadávané

Categories

Authors

Publishers

Produkty

Produkty

Semiconductor Lithography

Principles, Practices, and Materials

Informácie o knihe

Kompletný popis

Mohlo by vás zaujímať

Zákazníci, ktorí si kúpili túto knihu, kúpili tiež