Predictive Simulation of Semiconductor Processing

Name: Predictive Simulation of Semiconductor Processing
Brand: Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
SKU: 9783642058042
Price: 219.71 EUR
Availability: InStock

Status and Challenges

Autor: Jarek Dabrowski, Eicke R. Weber

Jazyk:

Väzba: Brožovaná

Vydavateľ: Springer-Verlag Berlin and Heidelberg GmbH & Co. KG

Dostupnosť: Skladom u dodávateľa

Odosielame za 5-8 dní

219.71 €

Predictive Simulation of Semiconductor Processing enables researchers and developers to extend the s...

Informácie o knihe

Autor

Jarek Dabrowski, Eicke R. Weber

Jazyk

Angličtina

Väzba

Kniha - Brožovaná

Vydalo

2010

Stránok

490

EAN

9783642058042

ISBN

3642058043

Enbook ID

01651135

Vydavateľ

Springer-Verlag Berlin and Heidelberg GmbH & Co. KG

Hmotnosť

859

Rozmery

155 x 235 x 28

Kompletný popis

Predictive Simulation of Semiconductor Processing enables researchers and developers to extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion, ion implantation, epitaxy, defect formation and annealing, and contamination. This book presents an in-depth discussion of our current understanding of key processes and identifies areas that require further work in order to achieve the goal of a comprehensive, predictive process simulation tool.Predictive simulation of semiconductor processing enables researchers and developers to extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion, ion implantation, epitaxy, defect formation and annealing, and contamination. This book presents an in-depth discussion of our current understanding of key processes and identifies areas that require further work in order to achieve the goal of a comprehensive, predictive process simulation tool.

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