Micromirror Technology for Maskless Lithography

Name: Micromirror Technology for Maskless Lithography
Brand: Scholars' Press
SKU: 9783639513653
Price: 68.71 EUR
Availability: InStock

Dynamics, Control and Fabrication

Autor: Chen Yijian

Jazyk:

Väzba: Brožovaná

Vydavateľ: Scholars' Press

Dostupnosť: Skladom u dodávateľa

Odosielame za 5-8 dní

68.71 €

This book presents a complete analysis and review of dynamics, control and fabrication of MEMS micro...

Informácie o knihe

Autor

Chen Yijian

Jazyk

Angličtina

Väzba

Kniha - Brožovaná

Vydalo

2013

Stránok

156

EAN

9783639513653

ISBN

3639513657

Enbook ID

06847304

Vydavateľ

Scholars' Press

Hmotnosť

236

Rozmery

152 x 229 x 9

Kompletný popis

This book presents a complete analysis and review of dynamics, control and fabrication of MEMS micromirrors for applications in DUV and EUV maskless lithography. The transient and resonant behavior of various types of electro-mechanically damped micromirrors with various degrees of freedom are discussed. The theoretical approach using the perturbation method and linear control theory is described. Micromirror design and fabrication issues including the material properties, process integration, and device reliability are addressed. Novel processing solutions such as the self-aligned spacer patterning technique to define nano-scale actuation gaps for low-voltage operation are introduced. Fabrication results of highly complicated 3-D MEMS devices such as vertical-comb tilting micromirrors and double-flexure piston micromirrors are demonstrated. This book serves as an excellent in-depth source of MEMS dynamics, control, and fabrication knowledge for both graduate students and experienced researchers.

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Micromirror Technology for Maskless Lithography

Dynamics, Control and Fabrication

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