Mechanical Microsensors

Name: Mechanical Microsensors
Brand: Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
SKU: 9783540675822
Price: 210.27 EUR
Availability: InStock

Autor: Miko Elwenspoek, Remco Wiegerink

Jazyk:

Väzba: Pevná

Vydavateľ: Springer-Verlag Berlin and Heidelberg GmbH & Co. KG

Dostupnosť: Skladom u dodávateľa v malom množstve

Odosielame za 13-18 dní

210.27 €

This book provides a comprehensive description of microsensors for mechanical quantities (flow, pres...

Informácie o knihe

Autor

Miko Elwenspoek, Remco Wiegerink

Jazyk

Angličtina

Väzba

Kniha - Pevná

Vydalo

2000

Stránok

295

EAN

9783540675822

ISBN

3540675825

Enbook ID

01567421

Vydavateľ

Springer-Verlag Berlin and Heidelberg GmbH & Co. KG

Hmotnosť

1340

Rozmery

155 x 235 x 23

Kompletný popis

This book provides a comprehensive description of microsensors for mechanical quantities (flow, pressure, force, inertia) fabricated by silicon micromachining. Since the design of such sensors requires interdisciplinary teamwork, the presentation is made accessible to engineers trained in electrical and mechanical engineering, physics and chemistry. The reader is guided through the micromachining fabrication process. A chapter on microsensor packaging completes the discussion of technological problems. The description of the basic physics required for sensor design includes the mechanics of deformation and the piezoresistive transduction to electrical signals. There is also a comprehensive discussion of resonant sensors, the hydrodynamics and heat transfer relevant for flow sensors, and, finally, electronic interfacing and readout circuitry. Numerous up-to-date case studies are presented, together with the working, fabrication and design of the sensors.§The ser ries "Microtechnology and MEMS" comprises textbooks, monographs, and state-of-the-art reports in the very active field of microsystems and microtechnology. Written by leading physicists and engineers, the books describe the basic science, device design, and applications. They will appeal to researchers, engineers, and advanced students.

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