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Kniha Ion Sources hang Huashun

Ion Sources

Autor: hang Huashun
Jazyk: Angličtina
Väzba: Pevná
Vydavateľ: Springer, Berlin
Dostupnosť: Skladom u dodávateľa
Odosielame za 10-13 dní
219.72 €
Ion implantation has become a basic technology in device manufacturing. For efficient use of this ac...

Informácie o knihe

Autor
hang Huashun
Jazyk
Angličtina
Väzba
Kniha - Pevná
Vydalo
1999
Stránok
476
EAN
9783540657477
ISBN
3540657479
Enbook ID
01566924
Vydavateľ
Springer, Berlin
Hmotnosť
894
Rozmery
156 x 234 x 26

Kompletný popis

Ion implantation has become a basic technology in device manufacturing. For efficient use of this accelerator-based technique the choice of appropriate ion sources is important. This book deals with the design and operation of ion sources. Additionally the physics of ion formation of the various elements with different charge states and charge neutralization are discussed. Ion selection and beam diagnostics are part of the book too. The presentation of the necessary equations and diagrams for the various parameters makes this book useful as a handbook for ion sources.

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