Introduction to Microsystem Technology - A Guide for Students

Autor: Gerald Gerlach, Wolfram Dotzel

Jazyk:

Väzba: Pevná

Vydavateľ: John Wiley & Sons Inc

Dostupnosť: Skladom u dodávateľa

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Over half a century after the discovery of the piezoresistive effect, microsystem technology has exp...

Informácie o knihe

Autor

Gerald Gerlach, Wolfram Dotzel

Jazyk

Angličtina

Väzba

Kniha - Pevná

Vydalo

2008

Stránok

376

EAN

9780470058619

ISBN

0470058617

Enbook ID

04879299

Vydavateľ

John Wiley & Sons Inc

Hmotnosť

812

Rozmery

177 x 252 x 24

Kompletný popis

Over half a century after the discovery of the piezoresistive effect, microsystem technology has experienced considerable developments. Expanding the opportunities of microelectronics to non-electronic systems, its number of application fields continues to increase. Microsensors are one of the most important fields, used in medical applications and micromechanics. Microfluidic systems are also a significant area, most commonly used in ink-jet printer heads. This textbook focuses on the essentials of microsystems technology, providing a knowledgeable grounding and a clear path through this well-established scientific dicipline. With a methodical, student-orientated approach, Introduction to Microsystem Technology covers the following: microsystem materials (including silicon, polymers and thin films), and the scaling effects of going micro; fabrication techniques based on different material properties, descriptions of their limitations and functional and shape elements produced by these techniques; sensors and actuators based on elements such as mechanical, fluidic, and thermal (yaw rate sensor components are described); the influence of technology parameters on microsystem properties, asking, for example, when is the function of a microsystem device robust and safe? The book presents problems at the end of each chapter so that you may test your understanding of the key concepts (full solutions for these are given on an accompanying website). Practical examples are included also, as well as case studies that enable a better understanding of the technology as a whole. With its extensive treatment on the fundamentals of microsystem technology, this book also serves as a compendium for engineers and technicians working with microsystem technology.

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Introduction to Microsystem Technology - A Guide for Students

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