Kniha Glow Discharge Processes - Sputtering and Plasma Etching Brian Chapman

Glow Discharge Processes - Sputtering and Plasma Etching

Autor: Brian Chapman
Jazyk: Angličtina
Väzba: Pevná
Vydavateľ: John Wiley & Sons Inc
Dostupnosť: Skladom u dodávateľa
Odosielame za 10-18 dní
251.87
Develops detailed understanding of the deposition and etching of materials by sputtering discharge,...

Informácie o knihe

Jazyk
Angličtina
Väzba
Kniha - Pevná
Stránok
432
EAN
9780471078289
ISBN
047107828X
Enbook ID
04887388
Hmotnosť
706
Rozmery
168 x 244 x 28

Kompletný popis

Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.

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