Germanium Surface Preparation Methods

Name: Germanium Surface Preparation Methods
Brand: VDM Verlag Dr. Mueller E.K.
SKU: 9783836484114
Price: 47.57 EUR
Availability: InStock

Germanium Surface Cleaning and Preparation Methodsfor Semiconductor Applications

Autor: Jungyup Kim

Jazyk:

Väzba: Brožovaná

Vydavateľ: VDM Verlag Dr. Mueller E.K.

Dostupnosť: Skladom u dodávateľa

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47.57 €

Germanium is gaining interest in the semiconductorindustry as a replacement channel material for hig...

Informácie o knihe

Autor

Jungyup Kim

Jazyk

Angličtina

Väzba

Kniha - Brožovaná

Vydalo

2008

Stránok

108

EAN

9783836484114

ISBN

3836484110

Enbook ID

06985696

Vydavateľ

VDM Verlag Dr. Mueller E.K.

Hmotnosť

154

Rozmery

152 x 229 x 6

Kompletný popis

Germanium is gaining interest in the semiconductorindustry as a replacement channel material for highmobility applications. Contamination directlyaffects the device performance, yield andreliability. Therefore, continued device scaling isdependent on effective surface preparation includingeffective contamination and particle removal ofgermanium surface. Cleaning and preparation methodsfor silicon surface have been extensively developedover the past few decades. Germanium surfacecleaning and preparation is at its infancy and ismarkedly different from that of silicon. This bookexamines these differences and fundamentals involvedin germanium surface cleaning. This book alsoproposes methods for basic germanium surfacecleaning and the basis for further processdevelopment for professionals involved in surfacecleaning of semiconductor materials.

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Germanium Surface Preparation Methods

Germanium Surface Cleaning and Preparation Methodsfor Semiconductor Applications

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Kompletný popis

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