Developments in Surface Contamination and Cleaning, Volume 8

Autor: Rajiv Kohli

Jazyk:

Väzba: Pevná

Vydavateľ: William Andrew Publishing

Dostupnosť: U vydavateľa na objednávku

Odosielame za 28-34 dní

196.48 €

As device sizes in the semiconductor industries shrink, devices become more vulnerable to smaller co...

Informácie o knihe

Autor

Rajiv Kohli

Jazyk

Angličtina

Väzba

Kniha - Pevná

Vydalo

2014

Stránok

234

EAN

9780323299619

ISBN

032329961X

Enbook ID

05160758

Vydavateľ

William Andrew Publishing

Hmotnosť

530

Rozmery

157 x 234 x 13

Kompletný popis

As device sizes in the semiconductor industries shrink, devices become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not effective at smaller scales. The book series Developments in Surface Contamination and Cleaning as a whole provides an excellent source of information on these alternative cleaning techniques as well as methods for characterization and validation of surface contamination. Each volume has a particular topical focus, covering the key techniques and recent developments in the area. Several novel wet and dry surface cleaning methods are addressed in this Volume. Many of these methods have not been reviewed previously, or the previous reviews are dated. These methods are finding increasing commercial application and the information in this book will be of high value to the reader. Edited by the leading experts in small-scale particle surface contamination, cleaning and cleaning control these books will be an invaluable reference for researchers and engineers in R&D, manufacturing, quality control and procurement specification situated in a multitude of industries such as: aerospace, automotive, biomedical, defense, energy, manufacturing, microelectronics, optics and xerography. This Volume complements other volumes in this series and: * provides a state-of-the-art survey and best-practice guidance for scientists and engineers engaged in surface cleaning or handling the consequences of surface contamination* addresses the continuing trends of shrinking device size and contamination vulnerability in a range of industries, spearheaded by the semiconductor industry and others* covers novel wet and dry surface cleaning methods of increasing commercial importance

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Developments in Surface Contamination and Cleaning, Volume 8

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