Kniha Boron nitride thin films Jean Lorenzzi

Boron nitride thin films

Autor: Jean Lorenzzi
Jazyk: Angličtina
Väzba: Brožovaná
Vydavateľ: VDM Verlag
Dostupnosť: U vydavateľa na objednávku
Odosielame za 17-27 dní
48.44
In this work we present the results of the thin films of boron nitride deposited by D.C. and R.F. ma...

Informácie o knihe

Jazyk
Angličtina
Väzba
Kniha - Brožovaná
Vydalo
2010
Stránok
96
EAN
9783639076356
ISBN
3639076354
Enbook ID
06816880
Vydavateľ
Hmotnosť
150
Rozmery
152 x 229 x 6

Kompletný popis

In this work we present the results of the thin films of boron nitride deposited by D.C. and R.F. magnetron sputtering from hot-pressed B4C and h-BN targets on two different substrates: Si3N4 ceramics with different surface finishing and Si(100) wafers. The influence of parameters such as substrate temperature and working gas composition ratio (N2 or Ar), on film thickness, deposition rate, cristallinity, residual stress, phase composition and hardness, were systematically investigated using techniques like SEM, XRD, FT-IR and nanohardness.

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